Nowadays, semiconductor chip factories are picky about the cleanliness of the air in the production environment and have strict requirements for air filters. The dust adhered to the chip may cause open circuit and short circuit and directly affect the yield. The effective filter and fan filter unit (FFU) used in the chip factory shall be scanned and tested before leaving the factory.

The chip factory does not recognize the accounts of sodium flame method and DOP method. The North filter will explain the use of various air filters in the chip factory:

Air filter

Chip factories pay special attention to the possible trace volatile elements on the filter. In recent years, there has been an effective filter material of PTFE fiber. This material has no volatiles, but it has static electricity. The filtered air should be electrically neutralized to eliminate ions, which has fewer hidden dangers and more troubles. However, when the line width of the chip is as small as 0.5um, it is found that the chemical pollutants in the air have become the main harm affecting the yield. Therefore, chemical filters are generally configured in the air conditioning system of the later core plant. The chemical filter said by the chip factory is activated carbon filter. Its principle and manufacturing process are not complex.

In many cases, designers and field personnel cannot tell the type and concentration of pollutants. Therefore, the chemical filter used in chip factory should have two characteristics: broad-spectrum adsorption performance and enough adsorption materials.

If the types of pollutants can be determined, targeted chemical treatment can be carried out on the adsorption materials to enhance the adsorption capacity of specific pollutants. Filter suppliers sometimes provide corresponding on-site testing services to help users determine the use of chemical filters, which requires that suppliers have experts engaged in chemical filtration and have a close relationship with the laboratory.